Keyence LS-5000 Manuel d'utilisateur

InstructionManualHigh-speed Laser Scan MicrometerLS-5000 Series96M12426

Follow the safety precautions below to ensure operator safety:• Operate the LS-5000 series only according to the procedures described inthis instructi

Chapter 8 RS-232C I/O948 Operating ProcedureExample: Turn ON the synchronous input.Note 1: The operating procedure for functions other than “sync

Chapter 8 RS-232C I/O958 Operating ProcedureExample: Change the program number.Reading Preset Data (Batch)This function is used to store the LS-5

Chapter 8 RS-232C I/O968Writing Preset Data (Batch)This function is used to write stored data to the LS-5000 series.• Received command• Transmitte

Chapter 8 RS-232C I/O9788.3 Command ListThis section lists all commands and describes each code.1. Upper line: Character code, Lower line: ASCII c

Chapter 8 RS-232C I/O988Sample Program (BASIC)The following program can controll the LS using your computer’s keyboard.100 OPEN"COM1:9600,N,8

Chapter 9Expansion I/O Board9.1 Control I/O Board ... 1009.1.1 Part Names and Pin Assignmen

Chapter 9 Expansion I/O Board10099.1 Control I/O Board (Model: LS-B11)This control I/O board is used for comparator output and synchronous input.

Chapter 9 Expansion I/O Board10199.1.2 I/O Terminal Operations11111 7-level comparator output (terminals 1 to 14)The LS-5000 series performs compa

Chapter 9 Expansion I/O Board10299.1.3 SpecificationsInput/Output Output• NPN open-collector output• Max. applicable voltage: 40 V• Max. sink cur

Chapter 10Display System Setup10.1 Display System Setup ... 10410.1.1 Adjusting Backlight Intensity

Chapter 1 Laser Safety Precautions1LS-5041TLS-5041TLaser ON alarm indicator• LASER ON alarm indicatorThe scanning head has an LED which indicates

Chapter 10 Display System Setup1041010.1 Display System SetupThis section describes how to adjust the display backlight intensity, contrast,revers

Chapter 10 Display System Setup1051010.1.2 Reversing DisplayThe display screen can be reversed. Setting Procedure1. Select the SYSTEM MODE screen

Chapter 10 Display System Setup1061010.1.3 Adjusting ContrastThe contrast of the display screen can be adjusted. Setting Procedure1. Select the S

Chapter 10 Display System Setup1071010.1.4 Setting Backlight OFF TimeThis function is used to turn OFF the backlight when the display has not been

Chapter 10 Display System Setup1081010.1.5 Adjusting Buzzer VolumeThe buzzer sound heard with each key press can be adjusted in four levels (large

Chapter 10 Display System Setup1091010.1.6 Numeric KeysThis section describes the numeric keys.BUZZER VOLUMEBACKLIGHT OFF [00SMALLLS SYSTEM SETUP0

Chapter 10 Display System Setup1101010.2 Display Hardware Check FunctionThis function is used for factory adjustment only. Do not touch the [SELF-

Chapter 10 Display System Setup1111010.3 Replacing Protective SheetTo replace the protective sheet, perform the following procedure. LS-55011. Re

Chapter 10 Display System Setup1121010.4 Display Panel-lock FunctionThis function disables key operations on the liquid crystal display panel, thu

AppendicesAppendix A Specifications ... 114Appendix B Initial Setting ...

6CAUTION1.6 Preparation for Operation Suppressing noise interferenceBe sure to isolate the connection cable from high-voltage or power lines. If thec

Appendices114AppendicesAppendix A SpecificationsSpecificationsControllerType Built-in Display type Separate display typeModel LS-5501 LS-5001Display

Appendices115AppendicesMeasurement Range and Accuracy LS-5041200 mm408080 120± 8 µm± 10 µm± 20 µmTransmitter Receiver LS-5121Temperature Characteris

Appendices116AppendicesAppendix B Initial SettingsNORMAL ModeItem Initial settingDisplay Data Display output OUT1 ONOUT2 OFFOUT3 OFFOUT4 OFFDisplay

Appendices117AppendicesPITCH ModeItem Initial settingDisplay Data Display output OUT1: ONOUT2: OFFOUT3: OFFOUT4: OFFLimit Setup1.Upper limit 0.01 mm (

Appendices118AppendicesAppendix C Troubleshooting GuideIf a condition occurs that could be due to equipment failure or malfunction, followthe inspec

Appendices119AppendicesProblemItemInspectionActionRef. pageMeasuredvaluedisplayDisplayed value isincorrect.• Check if scanning head’s serialNo. matche

Appendices120AppendicesAppendix D Error MessagesThe LS-5000 series displays the error messages “HEAD ERROR”, “ROM BOARDERROR” and “BATTERY ERROR”.He

Appendices121AppendicesAppendix E Minimum Input Time and Output Response TimeThis section describes the minimum input time and the output response t

Appendices122AppendicesAppendix F DimensionsThis section lists the dimensions of each model. LS-5041 LS-5001342421131555105 105 321786 76 86764955

Appendices123Appendices LS-5121 LS-550118719712618014841230 8055351025150155 175 1732180 1861801686202520*1504-M4 effective depth: 104-ø6.5 through-

Chapter 2Before Using the LS-5000 Series2.1 System Configuration and Connections ... 82.1.1 System Configuration ...

Appendices124Appendices

WARRANTIES AND DISCLAIMERS(1) KEYENCE warrants the Products to be free of defects in materials and workmanship for a period of one (1) year from the d

Copyright (c) 2012 KEYENCE CORPORATION. All rights reserved. 12425E 1033-1 96M12426 Printed in Japan

Chapter 2 Before Using the LS-5000 Series822.1 System Configuration and ConnectionsThe LS-5000 series includes the display unit, controller and sc

Chapter 2 Before Using the LS-5000 Series92CAUTION2.1.2 Connection ProcedureConnecting the Scanning HeadBe sure to turn the power off before conne

Chapter 2 Before Using the LS-5000 Series102 Connecting Transmitter and Receiver1. Connect the cable between the transmitter and receiver.Use the

Chapter 2 Before Using the LS-5000 Series112Connecting I/O BoardBe sure to turn the power off before connecting the I/O board.1. Remove the frame

Chapter 2 Before Using the LS-5000 Series1222.2 Names and Functions of Indicators and SwitchesThis section describes the names and functions of th

Chapter 2 Before Using the LS-5000 Series1322.3 Part NamesThis section describes the part names of each model.LS-5001 (Separate display type)Front

iSafety PrecautionsThis instruction manual describes the operation and function of the LS-5000 series.Read this manual carefully to ensure safe use an

Chapter 2 Before Using the LS-5000 Series142LS-5041/5121 (Scanning head)1 Laser ON alarm indicator2 Transmitter (T)3 Laser emission aperture4 Rece

Chapter 3Quick Start Reference3.1 Quick Start Reference ... 163.1.1 Procedure for Starting Measur

Chapter 3 Quick Start Reference1633.1 Quick Start ReferenceThis section describes the procedures for starting measurement for trial operation.3.1.

Chapter 4Installation4.1 Mounting the Scanning Head ... 184.2 Mounting the Controller ...

Chapter 4 Installation1844.1 Mounting the Scanning HeadThe LS-5000 series comes with the transmitter and receiver fixed to the scanninghead mounti

19Chapter 4 Installation44.2 Mounting the ControllerThis section describes how to mount the controller (LS-5001).Mounting the LS-5001The LS-5001 c

Chapter 4 Installation204

Chapter 5Outline of Measurements5.1 Area/Segment/Edge ... 225.2 Normal Mode ...

Chapter 5 Outline of Measurements2255.1 Area/Segment/EdgeWhen a target is placed in the measuring area, there are areas where the laserbeam is rec

Chapter 5 Outline of Measurements2355.2.1 DIA ModeExample: Outer diameter measurement using a rod or transparent objectThe width between the lower

Checking the Contents of the PackageThe LS-5000 series includes the following items. Be sure to check that no item ismissing or damaged. LS-5501 Pack

Chapter 5 Outline of Measurements2455.3 Pitch Mode ➮ For the setting procedure, see p. 72.Pitch mode enables pitch measurement using connector pin

Chapter 6Normal Mode6.1 Normal Mode Screens ... 266.2 Initial Screen ...

Chapter 6 Normal Mode2666.1 Normal Mode ScreensLASER ON SCREENNORMALP. 1DISPLAY DATADISPLAY DATADISPLAY GRAPHDISPLAY GRAPHONOUT1SET SETOFFOUT2OUT1

Chapter 6 Normal Mode2766.2 Initial ScreenLaser ON/OFFstatusScreen titleMeasuringmodeProgram No.Hold switchScreenselectingswitchTo theOPTION Sscre

Chapter 6 Normal Mode2866.3 Setting Measuring ModeSetting Scanning Head and Measurement1. Setting Measuring AreaThe LS-5000 series can simultaneou

Chapter 6 Normal Mode2966.4 Setting FunctionsNames and functionsTag/Button Function Description ReferencepageDISPLAY HOLD Hold A measured value ca

Chapter 6 Normal Mode30611111 [HOLD] Hold FunctionThe hold function allows the displayed value and output value to be held or resetregardless of t

Chapter 6 Normal Mode31622222 [ZERO] Auto-zero FunctionThe auto-zero function can instantaneously reset the displayed value to “0.0000”.This funct

Chapter 6 Normal Mode32633333 [SCREEN] Screen Selection FunctionThe screen selection function allows you to select the DISPLAY DATA screen (1 to4

Chapter 6 Normal Mode3363. Set the output to be displayed. (➮ For setting outputs, see p.41.)Turn ON the output to be displayed.If an output is no

Chapter 1 Laser Safety Precautions1.1 Classification ... 21.2 W

Chapter 6 Normal Mode3464. Set the range of GRAPH display.Perform “RANGE SETUP”. Press the [RANGE] button.Select the item from MAX or MIN using th

Chapter 6 Normal Mode35644444 Limit Setup7-level-tolerance-limits can be set separately for four outputs. (➮ See p.41 forsetting output.) Setting

Chapter 6 Normal Mode36655555 [CALIB] Calibration SetupMinute measurement fluctuations caused by a change in the target surface condi-tion or targ

Chapter 6 Normal Mode3764. Insert sample workpiece 2 to check the measured value.Enter the value of sample workpiece 2 using the numeric keys, and

Chapter 6 Normal Mode38666666 [PROGRAM] Program Selection FunctionThe LS-5000 series can store all measurement conditions as a program. Up to 16pr

Chapter 6 Normal Mode39677777 Area SetupThe scanning head (Head 1 to Head 4) and measuring mode (DIA, T.EDGE,B.EDGE, SEG(m,n))can be selected for

Chapter 6 Normal Mode406 Procedure for Setting Edge Number (Only when SEG is selected.)1. Select the AREA SETUP screen.Perform steps 1 and 2 desc

Chapter 6 Normal Mode41688888 Calculation SetupThe following calculation modes can be set for the area (A1 to A4) specified on theAREA SETUP scree

Chapter 6 Normal Mode426[Example 2]Two scanning heads are used to measure a sheet width.Setting StatusThe measured values of HEAD1 and HEAD 2 are

Chapter 6 Normal Mode436OFF–A1/4+A1+A1/2+A1/3+A1/4–A1–A1/2–A1/33. Set the calculation modes.Every time you press the [CALCULATE] button, the setti

ivChapter 6 Normal mode6.1 Normal Mode Screens ... 246.2 Initial Screen ...

Chapter 6 Normal Mode44699999 AverageThe number of averaging measurements can be set based on the application asfollows.• Increase the number of a

Chapter 6 Normal Mode456[Relationship between number of averaging measurements and averaging time]No. of averaging Averaging timemeasurements1 0.8

Chapter 6 Normal Mode46600000 Measuring modeThe LS-5000 series provides the following nine measuring modes.Mode DescriptionNormal The measured val

Chapter 6 Normal Mode476 Setting Procedure1. Select the OPTIONS screen.Press the [OPTIONS] button.2. Select the OUTPUT MODE screen.Press the [OUT

Chapter 6 Normal Mode486Note 1: The self-timing setting is effective only when self-timing mode is selected.Note 2: The self-timing interval shoul

Chapter 6 Normal Mode496● Bottom hold modeThe minimum value during a specified period can be measured.The sampling period is the duration between

Chapter 6 Normal Mode506● Auto peak hold modeThe maximum value after measurement starts can be measured.Timing Diagram● Auto bottom hold modeThe m

Chapter 6 Normal Mode516● Auto difference hold modeThe difference between the maximum and minimum values after measurementstarts can be measured.T

Chapter 6 Normal Mode526● Self-timing modeMeasurement is automatically performed according to the internal synchronoussignal.Timing DiagramNote 1:

Chapter 6 Normal Mode5361Edge No.21Edge No.234Target recognition method by measuring mode• DIA mode: A target is recognized when the number of edg

vChapter 8 RS-232C I/O8.1 RS-232C Communication Protocol ... 888.2 Remote Control Function ...

Chapter 6 Normal Mode546AAAAA Digit Suppression FunctionThe digits after the decimal point can be suppressed as required. Setting Procedure1. Sel

Chapter 6 Normal Mode556BBBBB Offset FunctionThe desired value can be added to or subtracted from the displayed value. Setting Procedure1. Select

Chapter 6 Normal Mode5666. Enter an offset value using the numeric keys, and press [ENTER].Note: The maximum and minimum offset values are as foll

Chapter 6 Normal Mode576CCCCC Analog Output FunctionAn analog voltage proportional to the displayed value can be output using anoptional I/O board

Chapter 6 Normal Mode5863. Set the analog output function.Press the button corresponding to the output for which the analog output func-tion is to

Chapter 6 Normal Mode596DDDDD I/O Slot SetupThe expansion I/O board can be set. ➮ See p. 100. Setting Procedure1. Select the OPTIONS screen. Pres

Chapter 6 Normal Mode606EEEEE InspectionThe scanning head can be checked for conditions such as dust on the frontsurface, laser condition, and opt

Chapter 6 Normal Mode616● Optical axis misalignment indicationsOptical axis misalignment is indicated when the receiver is tilted relative to theo

Chapter 6 Normal Mode626FFFFF One-scan ModeData on only one of the 12 surfaces of the polygon mirror becomes effective.(This mode negates slight c

Chapter 6 Normal Mode636Note: The laser beam spot diameter is 0.2 mm at a distance of 80 mm from thetransmitter. For gap measurement, however, a g

Chapter 1Laser Safety Precautions1.1 Classification ... 21.2 Warning Labels ...

Chapter 6 Normal Mode646GGGGG Program Selection Method SetupThe program selection method can be set to the front panel or the rear terminals. Set

Chapter 6 Normal Mode656HHHHH Display UnitThe measured value can be displayed in millimeters or inches.Note: When the display units setting is cha

Chapter 6 Normal Mode666IIIII Area Check FunctionWhen the number of edges changes during measurement, the area check functiondisplays the “----” e

Chapter 6 Normal Mode676JJJJJ InitializeThis function resets all settings to the initial values. ➮ See p. 116 and 117. Setting Procedure1. Select

Chapter 6 Normal Mode686KKKKK Mode ChangeThe measuring mode can be changed from Normal mode to Pitch mode. Setting Procedure1. Select the OPTIONS

Chapter 7Pitch ModeThis section describes functions and settings procedures for Pitch mode.7.1 Pitch Mode Screens ...

Chapter 7 Pitch Mode7077.1 Pitch Mode ScreensLASER ON OPTIONS P. 1PITCHDISPLAYDATALIMITSET UPPROGRAM OPTIONSHEAD1HEAD2HEAD3HEAD4MODECHANGEPitch-&g

Chapter 7 Pitch Mode7177.2 Initial ScreenLASER ON DISPLAY DATA PITCH P. 1HEAD1OKMaxMin0.50100.4990HEAD2OKMaxMin0.60100.5990HEAD3OKMaxMin0.70200.69

Chapter 7 Pitch Mode7277.3 Setting MeasurementWhen Pitch mode is selected, only one measurement can be performed with onescanning head, unlike in

Chapter 7 Pitch Mode7377.4 Setting FunctionsSwitch Function Description ReferencepageDATA DISPLAY Screen Selection Measurement results are 72, 73d

2Chapter 1 Laser Safety Precautions1.1 Classification1.2 Warning Labels LS-5041Warning label/Aperture labelFDA Class II IEC Class 2IEC (French) C

Chapter 7 Pitch Mode747 Setting Procedure1. Select the DISPLAY DATA screen.Press the [DISPLAY DATA] button.Press the [SCREEN] button.2. Select th

Chapter 7 Pitch Mode75722222 Limit SetupThe reference value, upper limit, and lower limit can be set separately for each ofthe four scanning head

Chapter 7 Pitch Mode76733333 Program Selection FunctionThe LS-5000 series can store all the measurement conditions as a program. Up to16 programs

Chapter 7 Pitch Mode77744444 Setting Number of PitchesThe number of pitches can be set up to 100, depending on the target.Example: IC lead pitch m

Chapter 7 Pitch Mode787Note 1: Up to 100 pitches can be set.Note 2: When the number of pitches for a target is different from the preset numberof

Chapter 7 Pitch Mode79755555 AverageThe number of averaging measurements can be set, according to the application,as follows:• Increase the number

Chapter 7 Pitch Mode80766666 Digit Suppression FunctionThe number of digits after the decimal point can be suppressed as desired. Setting Procedu

Chapter 7 Pitch Mode81777777 Measuring ModeThe LS-5000 series provides the following three measuring modes.LASER ON OPTIONS P. 1PITCHDISPLAYDATALI

Chapter 7 Pitch Mode827● Normal modeThe maximum and minimum values of the measured pitch and the differentiationresult can be displayed/output at

Chapter 7 Pitch Mode837● Self-timing hold modeMeasurement can be automatically performed according to the internal synchro-nous signal.Timing Diag

3Chapter 1 Laser Safety Precautions1.3 Label Location LS-5041 LS-5121The IEC/DIN Warning labels are packed with the scanning head. Stick the War

Chapter 7 Pitch Mode84788888 MaskingUp to three pitches can be excluded from measurement, based on the application,as shown below.If pitch (1) and

Chapter 7 Pitch Mode85799999 Mode ChangeThe measuring mode can be changed from Pitch mode to Normal mode. Setting Procedure1. Select the OPTIONS

Chapter 7 Pitch Mode867

Chapter 8RS-232C I/O8.1 RS-232C Communication Protocol ... 888.2 Remote Control Function ...

Chapter 8 RS-232C I/O8888.1 RS-232C Communication ProtocolUsing the RS-232C interface, the LS-5000 series can communicate with a personalcomputer.

Chapter 8 RS-232C I/O898 Examples of Connections• Connection with a personal computerDelimiter: CR• Connection with the KV series* KV-300 series

Chapter 8 RS-232C I/O9088.2 Remote Control FunctionYou can control the LS-5000 series remotely by sending an ASCII command fromexternal equipment,

Chapter 8 RS-232C I/O918Example: Send the measured value from OUT No. 2 continuously.Note 1: When the LS-5000 series receives the “N” (continuous

Chapter 8 RS-232C I/O928• Received Command: [M] [0] [CR]• Transmitted dataIn Normal modeIn Pitch modeFirst data Second data Third data 4th data 5

Chapter 8 RS-232C I/O938Transmitted data for each display is as follows:ExampleControl Command 1Command list II1. Upper line: Character code, Lowe